- 专利标题: Method for producing Ge-core based waveguides
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申请号: US16213402申请日: 2018-12-07
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公开(公告)号: US11236417B2公开(公告)日: 2022-02-01
- 发明人: Jean-Michel Hartmann , Mickael Brun , Jean-Marc Fedeli , Maryse Fournier
- 申请人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 申请人地址: FR Paris
- 专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人地址: FR Paris
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: FR1761862 20171208
- 主分类号: C23C16/24
- IPC分类号: C23C16/24 ; C30B25/02 ; G02B6/10 ; C23C16/06 ; G02B6/13 ; C23C16/56 ; H01L21/02 ; G02B6/12
摘要:
A method for producing a waveguide including a germanium-based core and a cladding is provided, the method including a step of “low temperature” depositing of a shell after forming the core by engraving, such that the deposition temperature is less than 780° C., followed by a step of “high temperature” depositing of a thick encapsulation layer. The shell and the encapsulation layer at least partially form the cladding of the waveguide. Optionally, a step of annealing under hydrogen at a “low temperature”, less than 750° C., precedes the deposition of the shell. These “low temperature” annealing and depositing steps advantageously make it possible to avoid a post-engraving alteration of the free surfaces of the core during the forming of the cladding which is less germanium-rich.
公开/授权文献
- US20190177836A1 METHOD FOR PRODUCING GE-CORE BASED WAVEGUIDES 公开/授权日:2019-06-13
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