Invention Grant
- Patent Title: Reticle container
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Application No.: US16012253Application Date: 2018-06-19
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Publication No.: US11237477B2Publication Date: 2022-02-01
- Inventor: Pei-Cheng Hsu , Ta-Cheng Lien , Tzu Yi Wang , Hsin-Chang Lee
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: G03F1/66
- IPC: G03F1/66 ; G03F7/20 ; H01L21/673

Abstract:
A mask container for storing a mask for photolithography, includes a cover and a base having a plurality of tapered corners. The tapered corners taper outward and downward from a top major surface of the base. The cover having the tapered corners extends downward that covers the tapered corners of the base when the cover is attached to the base. The tapered corners of the cover are tapered at about the same angle as the tapered corners of the base so that a surface of the tapered corners of the cover is substantially parallel to a corresponding surface of the tapered corner of the base when the cover is attached to the base. A recess is located in the tapered corners of the cover. A biasing member and a ball-shaped member are located in the tapered corners of the base to mate with the recess when the cover is attached to the base.
Public/Granted literature
- US20190101821A1 RETICLE CONTAINER Public/Granted day:2019-04-04
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