Invention Grant
- Patent Title: Radiation source
-
Application No.: US16932184Application Date: 2020-07-17
-
Publication No.: US11237486B2Publication Date: 2022-02-01
- Inventor: Patrick Sebastian Uebel , Sebastian Thomas Bauerschmidt , Yongfeng Ni
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP19188036 20190724,EP19198105 20190918,EP20151889 20200115
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B6/02 ; G02F1/365 ; G02F1/35 ; G03F9/00

Abstract:
A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.
Public/Granted literature
- US20210026255A1 RADIATION SOURCE Public/Granted day:2021-01-28
Information query
IPC分类: