公开(公告)号：US12204229B2

公开(公告)日：2025-01-21

申请号：US18373421

申请日：2023-09-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz ,  Patrick Sebastian Uebel

IPC: G02F1/35 ,  G03F9/00 ,  H01S3/00 ,  H01S3/067

Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.

公开(公告)号：US11687009B2

公开(公告)日：2023-06-27

申请号：US17741545

申请日：2022-05-11

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz ,  Patrick Sebastian Uebel ,  Ronald Franciscus Herman Hugers ,  Jan Adrianus Boer ,  Edwin Johannes Cornelis Bos ,  Andreas Johannes Antonius Brouns ,  Vitaliy Prosyentsov ,  Paul William Scholtes-Van Eijk ,  Paulus Antonius Andreas Teunissen ,  Mahesh Upendra Ajgaonkar

IPC: G03F7/20 ,  G03F7/00 ,  G02B1/00 ,  G02B6/02 ,  G01B11/27 ,  G01J1/42 ,  G01M11/00

CPC classification number: G03F7/70625 ,  G01B11/27 ,  G01J1/4257 ,  G01M11/30 ,  G02B1/005 ,  G02B6/02 ,  G03F7/7065 ,  G03F7/70525

Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.

公开(公告)号：US20210063893A1

公开(公告)日：2021-03-04

申请号：US16983264

申请日：2020-08-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Andrey NIKIPELOV ,  Patrick Sebastian Uebel ,  Amir Abdolvand ,  Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz ,  Natallia Eduardauna Uzunbajakava

IPC: G03F7/20

Abstract: A system and method for providing a radiation source is disclosed. In one arrangement, the radiation source includes a gas cell having a window, an optical fiber that is hollow and has an axial direction, an end thereof being enclosed within the gas cell and optically coupled to the window via an optical path, and a surface, disposed around the end of the optical fiber, and extending past the end of the optical fiber in the axial direction towards the window so as to limit one or more selected from: the exchange of gas between the optical path and the remainder of the gas cell, ingress of plasma towards or into the optical fiber, and/or radical flux towards etch-susceptible surfaces.

公开(公告)号：US11774671B2

公开(公告)日：2023-10-03

申请号：US17077756

申请日：2020-10-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Patrick Sebastian Uebel ,  Peter Maximilian Götz ,  Sebastian Thomas Bauerschmidt ,  Coen Hubertus Matheus Baltis ,  Janneke Ravensbergen

IPC: G02B6/02 ,  C03B37/15 ,  F21V8/00 ,  G03F7/00 ,  G03F9/00

CPC classification number: G02B6/02328 ,  C03B37/15 ,  G02B6/0096 ,  G02B6/02347 ,  G03F7/7085 ,  G03F9/7034 ,  G03F9/7065 ,  C03B2203/16 ,  C03B2203/42

Abstract: Optical components and methods of manufacture thereof. A first optical component has a hollow-core photonic crystal fiber includes internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component includes a hollow-core photonic crystal fiber and a sleeve arrangement.

公开(公告)号：US11733617B2

公开(公告)日：2023-08-22

申请号：US17572864

申请日：2022-01-11

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian Uebel ,  Sebastian Thomas Bauerschmidt ,  Paul William Scholtes-Van Eijk

IPC: G03F7/20 ,  G03B27/42 ,  G03F9/00 ,  G03F7/00 ,  G02B6/02 ,  G02F1/365

CPC classification number: G03F9/7065 ,  G02B6/02328 ,  G02F1/365 ,  G03F7/7015 ,  G03F7/70133 ,  G03F7/70316 ,  G03F7/70325 ,  G03F7/70575 ,  G03F7/70616

Abstract: An apparatus for receiving input radiation and broadening a frequency range of the input radiation to provide broadband output radiation. The apparatus includes a chamber, a fiber, a gas generating apparatus, and a radical generating apparatus. The fiber includes a hollow core configured to guide radiation propagating through the fiber, the hollow core in fluid communication with the chamber. The gas generating apparatus is configured to provide a gas within the chamber. The radical generating apparatus is configured to provide free radicals within the chamber to reduce contaminants in the gas. The apparatus may be included in a radiation source.

公开(公告)号：US20220269183A1

公开(公告)日：2022-08-25

申请号：US17741545

申请日：2022-05-11

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz ,  Patrick Sebastian Uebel ,  Ronald Franciscus Herman Hugers ,  Jan Adrianus Boer ,  Edwin Johannes Cornelis Bos ,  Andreas Johannes Antonius Brouns ,  Vitaliy Prosyentsov ,  Paul William Scholtes - Van Eijk ,  Paulus Antonius Andreas Teunissen ,  Mahesh Upendra Ajgaonkar

IPC: G03F7/20 ,  G02B1/00 ,  G02B6/02 ,  G01B11/27 ,  G01J1/42 ,  G01M11/00

Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.

公开(公告)号：US11385402B2

公开(公告)日：2022-07-12

申请号：US16903530

申请日：2020-06-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Sebastian Thomas Bauerschmidt ,  Patrick Sebastian Uebel ,  Peter Maximilian Götz

IPC: G02B6/02 ,  G03F7/20 ,  G01B11/25

Abstract: A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.

公开(公告)号：US20220128912A1

公开(公告)日：2022-04-28

申请号：US17572864

申请日：2022-01-11

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian Uebel ,  Sebastian Thomas Bauerschmidt ,  Paul William Scholtes-Van Eijk

IPC: G03F9/00 ,  G03F7/20 ,  G02B6/02 ,  G02F1/365

Abstract: An apparatus for receiving input radiation and broadening a frequency range of the input radiation to provide broadband output radiation. The apparatus includes a chamber, a fiber, a gas generating apparatus, and a radical generating apparatus. The fiber includes a hollow core configured to guide radiation propagating through the fiber, the hollow core in fluid communication with the chamber. The gas generating apparatus is configured to provide a gas within the chamber. The radical generating apparatus is configured to provide free radicals within the chamber to reduce contaminants in the gas. The apparatus may be included in a radiation source.

公开(公告)号：US20220011644A1

公开(公告)日：2022-01-13

申请号：US17485836

申请日：2021-09-27

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian UEBEL ,  Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz

IPC: G02F1/35 ,  G02F1/365

Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.

公开(公告)号：US20210026255A1

公开(公告)日：2021-01-28

申请号：US16932184

申请日：2020-07-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Patrick Sebastian UEBEL ,  Sebastian Thomas Bauerschmidt ,  Yongfeng Ni

IPC: G03F7/20

Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.