Invention Grant
- Patent Title: Elastic wave device
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Application No.: US15922961Application Date: 2018-03-16
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Publication No.: US11239819B2Publication Date: 2022-02-01
- Inventor: Yutaka Kishimoto , Masashi Omura , Tetsuya Kimura
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JPJP2015-208801 20151023
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/02 ; H03H9/17 ; H03H9/145 ; H03H3/08 ; H03H9/05 ; H03H9/25 ; H01L41/047 ; H01L41/29 ; H01L41/312

Abstract:
An elastic wave device includes a supporting substrate, an acoustic multilayer film on the supporting substrate, a piezoelectric substrate on the acoustic multilayer film, and an IDT electrode on the piezoelectric substrate. The acoustic multilayer film includes at least four acoustic impedance layers. The at least four acoustic impedance layers include at least one low acoustic impedance layer and at least one high acoustic impedance layer having an acoustic impedance higher than the low acoustic impedance layer. The elastic wave device further includes a bonding layer provided at any position in a range of from inside the acoustic impedance layer, which is the fourth acoustic impedance layer from the piezoelectric substrate side towards the supporting substrate side, to an interface between the acoustic multilayer film and the supporting substrate.
Public/Granted literature
- US20180205362A1 ELASTIC WAVE DEVICE Public/Granted day:2018-07-19
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