- 专利标题: Method for determining at least one beam propagation parameter of a laser beam
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申请号: US16132965申请日: 2018-09-17
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公开(公告)号: US11243114B2公开(公告)日: 2022-02-08
- 发明人: Viktor Granson , Jonathan Mueller , Dirk Sodtke
- 申请人: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- 申请人地址: DE Ditzingen
- 专利权人: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- 当前专利权人: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- 当前专利权人地址: DE Ditzingen
- 代理机构: Fish & Richardson P.C.
- 主分类号: G01J1/42
- IPC分类号: G01J1/42 ; G02B7/16 ; B23K26/064 ; B23K26/402 ; G01M11/06
摘要:
The invention relates to a method for determining at least one beam propagation parameter (M2, w0, θ, z0) of a laser beam, comprising: directing the laser beam through a lens arrangement towards a spatially resolving detector, imaging the laser beam at a plurality of different focus positions (F1, . . . ) relative to the spatially resolving detector by adjusting a focal length (f1, . . . ) of the lens arrangement, and determining the at least one beam propagation parameter (M2, w0, θ, z0) by evaluating an intensity distribution (l(x,y)) of the laser beam on the spatially resolving detector at the plurality of different focus positions (F1, . . . ). The method comprises adjusting the focal length (f1, . . . ) of the lens arrangement by arranging lens elements (A1, . . . ; B1, . . . ) having different focal lengths (fA1, . . . ; fB1, . . . ) in a beam path of the laser beam.
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