Invention Grant
- Patent Title: High dynamic range capacitive pressure sensor
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Application No.: US16821898Application Date: 2020-03-17
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Publication No.: US11248975B2Publication Date: 2022-02-15
- Inventor: Timothy Byron Brown
- Applicant: Fluke Corporation
- Applicant Address: US WA Everett
- Assignee: Fluke Corporation
- Current Assignee: Fluke Corporation
- Current Assignee Address: US WA Everett
- Agency: Seed IP Law Group LLP
- Main IPC: G01L7/08
- IPC: G01L7/08 ; G01L9/12 ; G01L9/00

Abstract:
A method for expanding the dynamic range of a capacitive pressure sensor and a capacitive pressure sensor having an expanded dynamic range are provided. The capacitive pressure sensor may comprise capacitive plates. At least one plate may be contoured to increase a surface area exposed to the other of the capacitive plates. The capacitive pressure sensor may comprise a diaphragm that is movably responsive to pressure. The diaphragm may have a hollowed volume within an interior of the diaphragm operative to increase a flexibility of the diaphragm in response to the pressure. The capacitive pressure sensor may be one of a plurality of capacitive pressure sensors in a pressure sensing device. The capacitive pressure sensors may have different capacitive responses and may each output a pressure measurement, whereby the device may select a pressure measurement to output based at least in part on the capacitive responses.
Public/Granted literature
- US20200217734A1 HIGH DYNAMIC RANGE CAPACITIVE PRESSURE SENSOR Public/Granted day:2020-07-09
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