- Patent Title: Integrated digital force sensors and related methods of manufacture
-
Application No.: US16485016Application Date: 2018-02-09
-
Publication No.: US11255737B2Publication Date: 2022-02-22
- Inventor: Ali Foughi , Ryan Diestelhorst , Dan Benjamin , Julius Minglin Tsai , Michael Dueweke
- Applicant: NEXTINPUT, INC.
- Applicant Address: US CA Mountain View
- Assignee: NEXTINPUT, INC.
- Current Assignee: NEXTINPUT, INC.
- Current Assignee Address: US CA Mountain View
- Agency: Meunier Carlin & Curfman LLC
- International Application: PCT/US2018/017564 WO 20180209
- International Announcement: WO2018/148503 WO 20180816
- Main IPC: G01L1/18
- IPC: G01L1/18 ; B81B7/02 ; B81C1/00 ; G01L1/14 ; G01L1/16

Abstract:
In one embodiment, a ruggedized wafer level microelectromechanical (“MEMS”) force sensor includes a base and a cap. The MEMS force sensor includes a flexible membrane and a sensing element. The sensing element is electrically connected to integrated complementary metal-oxide-semiconductor (“CMOS”) circuitry provided on the same substrate as the sensing element. The CMOS circuitry can be configured to amplify, digitize, calibrate, store, and/or communicate force values through electrical terminals to external circuitry.
Public/Granted literature
- US20190383676A1 INTEGRATED DIGITAL FORCE SENSORS AND RELATED METHODS OF MANUFACTURE Public/Granted day:2019-12-19
Information query