Invention Grant
- Patent Title: Increased sensitivity z-axis accelerometer
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Application No.: US16129755Application Date: 2018-09-12
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Publication No.: US11255873B2Publication Date: 2022-02-22
- Inventor: Xin Zhang , Gaurav Vohra , Michael Judy
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08
Abstract:
Z-axis teeter-totter accelerometers with embedded movable structures are disclosed. The teeter-totter accelerometer may include an embedded mass which pivots or translates out-of-plane from the teeter-totter beam. The pivoting or translating embedded mass may be positioned to increase the sensitivity of the z-axis accelerometer by providing greater z-axis displacement than the teeter-totter beam itself exhibits.
Public/Granted literature
- US20200081029A1 INCREASED SENSITIVITY Z-AXIS ACCELEROMETER Public/Granted day:2020-03-12
Information query
IPC分类:
