A vacuum apparatus equipped with an automatic transport mechanism for transporting a specimen and a sensor for detecting a state of the vacuum apparatus includes: a determining unit which determines whether a recoverable error has occurred based on a signal from the sensor; and a display control unit which causes, when it is determined that a recoverable error has occurred, a display unit to display a procedure of a recovery operation in a wizard format. The display control unit determines whether the recovery operation has been performed according to the procedure displayed on the display unit based on a signal from the sensor, and causes the display unit to display a next procedure of the recovery operation when it is determined that the recovery operation has been performed according to the procedure.