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公开(公告)号：US11733188B2
公开(公告)日：2023-08-22
申请号：US17591803
申请日：2022-02-03
Applicant: JEOL Ltd.
Inventor： Kazunori Tsukamoto , Shigeru Honda
IPC: G01N23/2252 , H01J37/22
CPC classification number: G01N23/2252 , H01J37/222
Abstract: In an analyzer, an image processing unit performs processing of: dividing a measurement image into a plurality of partial measurement images, and dividing a reference image into a plurality of partial reference images; calculating a positional deviation amount of each of the partial measurement images relative to a corresponding partial reference image among the partial reference images; determining whether the positional deviation amount is a threshold or less; and correcting positional deviation of the measurement image based on the positional deviation amounts of the plurality of partial measurement images when the image processing unit has determined that the positional deviation amount is not the threshold or less.
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公开(公告)号：US20200058464A1
公开(公告)日：2020-02-20
申请号：US16536562
申请日：2019-08-09
Applicant: JEOL Ltd.
Inventor： Kazunori Tsukamoto
IPC: H01J37/244 , H01J37/252
Abstract: An X-ray analyzer includes: an X-ray detector that detects an X-ray emitted from a specimen and outputs a signal having a step that has a height corresponding to energy of the X-ray; a pulse generation circuit that converts the signal output from the X-ray detector into a first pulse signal; a pulse-width setting circuit that sets a pulse width; a pulse-width conversion circuit that converts a pulse width of the first pulse signal into the pulse width set by the pulse-width setting circuit to form a second pulse signal; a pulse-height discriminator that discriminates the second pulse signal according to a pulse height of the second pulse signal; a counting circuit that calculates a counting rate of the discriminated second pulse signal; and a counting-loss correction processing unit that corrects the counting rate. The counting-loss correction processing unit corrects the counting rate based on the pulse width.
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公开(公告)号：US11609191B2
公开(公告)日：2023-03-21
申请号：US16934340
申请日：2020-07-21
Applicant: JEOL Ltd.
Inventor： Kazunori Tsukamoto , Shigeru Honda
IPC: G01N23/2209 , G01N23/2208 , G01N23/2252
Abstract: An analyzer includes a wavelength-dispersive X-ray spectrometer and a control unit that controls the wavelength-dispersive X-ray spectrometer, the control unit performing: processing of acquiring an analysis result of preparatory analysis performed on a specimen to be analyzed; processing of setting spectroscopic conditions for WDS analysis using the wavelength-dispersive X-ray spectrometer based on the analysis result of the preparatory analysis; and processing of performing the WDS analysis on the specimen to be analyzed under the set spectroscopic conditions.
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公开(公告)号：US11467106B2
公开(公告)日：2022-10-11
申请号：US16885916
申请日：2020-05-28
Applicant: JEOL Ltd.
Inventor： Kazunori Tsukamoto , Masahiro Asai , Shigeru Honda
IPC: G01N23/207 , G01N23/2209 , G01N23/2252
Abstract: An X-ray analyzer includes: a specimen stage; a spectrometer having a spectroscopic element and an X-ray detector; a temperature measuring unit including at least one of a first temperature sensor for measuring a temperature of the specimen stage and a second temperature sensor for measuring a temperature of the spectrometer; a storage unit which stores calibration data of the spectrometer, and a previous measurement result by the temperature measuring unit at the time of execution of the calibration of the spectrometer; and a notifying unit which acquires a measurement result by the temperature measuring unit, calculates a temperature variation amount of the acquired measurement result with respect to the previous measurement result stored in the storage unit, and notifies that calibration is needed, based on the temperature variation amount.
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公开(公告)号：US20230083479A1
公开(公告)日：2023-03-16
申请号：US17941540
申请日：2022-09-09
Applicant: JEOL Ltd.
Inventor： Naoki Kato , Takashi Kimura , Kazunori Tsukamoto
IPC: G01N23/2252
Abstract: Provided is a scatter diagram display device that creates a plurality of scatter diagrams based on mapping data acquired by an analyzer and displays a scatter diagram matrix in which the created plurality of scatter diagrams are arranged in a matrix on a display section, the scatter diagram display device including: a display condition acceptance section that accepts a designation of a display range of an item in each of the plurality of scatter diagrams, and a display control section that extracts all scatter diagrams having the item whose display range has been designated from the plurality of scatter diagrams and changes the display range of the item in the extracted scatter diagrams based on the designation of the display range.
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Patent Agency Ranking
公开(公告)号：US11260427B2
公开(公告)日：2022-03-01
申请号：US16534065
申请日：2019-08-07
Applicant: JEOL Ltd.
Inventor： Kazunori Tsukamoto
Abstract: A vacuum apparatus equipped with an automatic transport mechanism for transporting a specimen and a sensor for detecting a state of the vacuum apparatus includes: a determining unit which determines whether a recoverable error has occurred based on a signal from the sensor; and a display control unit which causes, when it is determined that a recoverable error has occurred, a display unit to display a procedure of a recovery operation in a wizard format. The display control unit determines whether the recovery operation has been performed according to the procedure displayed on the display unit based on a signal from the sensor, and causes the display unit to display a next procedure of the recovery operation when it is determined that the recovery operation has been performed according to the procedure.
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7.发明申请公开(公告)号：US20210035772A1
公开(公告)日：2021-02-04
申请号：US16940856
申请日：2020-07-28
Applicant: JEOL Ltd.
Inventor： Kazunori Tsukamoto , Yuki Chiba
Abstract: A focus adjustment method for a charged particle beam device having a magnetic field lens used for focus adjustment and an astigmatism corrector includes: acquiring a plurality of first images by varying an excitation current of the magnetic field lens within a focus search range, and determining a reference value of the excitation current; removing hysteresis from the magnetic field lens by setting the excitation current of the magnetic field lens outside the focus search range before and after varying the excitation current of the magnetic field lens within the focus search range; and acquiring a plurality of second images by varying the excitation current of the magnetic field lens using the reference value as a reference and varying a stigma correction value of the astigmatism corrector at each excitation current, and then determining optimum values of the excitation current and the stigma correction value.
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公开(公告)号：US20200378909A1
公开(公告)日：2020-12-03
申请号：US16885916
申请日：2020-05-28
Applicant: JEOL Ltd.
Inventor： Kazunori Tsukamoto , Masahiro Asai , Shigeru Honda
IPC: G01N23/2209 , G01K13/00 , G01N23/2252
Abstract: An X-ray analyzer includes: a specimen stage; a spectrometer having a spectroscopic element and an X-ray detector; a temperature measuring unit including at least one of a first temperature sensor for measuring a temperature of the specimen stage and a second temperature sensor for measuring a temperature of the spectrometer; a storage unit which stores calibration data of the spectrometer, and a previous measurement result by the temperature measuring unit at the time of execution of the calibration of the spectrometer; and a notifying unit which acquires a measurement result by the temperature measuring unit, calculates a temperature variation amount of the acquired measurement result with respect to the previous measurement result stored in the storage unit, and notifies that calibration is needed, based on the temperature variation amount.
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公开(公告)号：US20200055092A1
公开(公告)日：2020-02-20
申请号：US16534065
申请日：2019-08-07
Applicant: JEOL Ltd.
Inventor： Kazunori Tsukamoto
Abstract: A vacuum apparatus equipped with an automatic transport mechanism for transporting a specimen and a sensor for detecting a state of the vacuum apparatus includes: a determining unit which determines whether a recoverable error has occurred based on a signal from the sensor; and a display control unit which causes, when it is determined that a recoverable error has occurred, a display unit to display a procedure of a recovery operation in a wizard format. The display control unit determines whether the recovery operation has been performed according to the procedure displayed on the display unit based on a signal from the sensor, and causes the display unit to display a next procedure of the recovery operation when it is determined that the recovery operation has been performed according to the procedure.
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10.发明授权公开(公告)号：US11776786B2
公开(公告)日：2023-10-03
申请号：US16940856
申请日：2020-07-28
Applicant: JEOL Ltd.
Inventor： Kazunori Tsukamoto , Yuki Chiba
CPC classification number: H01J37/21 , H01J37/14 , H01J37/22 , H01J37/28 , H01J2237/216
Abstract: A focus adjustment method for a charged particle beam device having a magnetic field lens used for focus adjustment and an astigmatism corrector includes: acquiring a plurality of first images by varying an excitation current of the magnetic field lens within a focus search range, and determining a reference value of the excitation current; removing hysteresis from the magnetic field lens by setting the excitation current of the magnetic field lens outside the focus search range before and after varying the excitation current of the magnetic field lens within the focus search range; and acquiring a plurality of second images by varying the excitation current of the magnetic field lens using the reference value as a reference and varying a stigma correction value of the astigmatism corrector at each excitation current, and then determining optimum values of the excitation current and the stigma correction value.
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