Invention Grant
- Patent Title: Polarization defined zero misalignment vias for semiconductor packaging
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Application No.: US16535618Application Date: 2019-08-08
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Publication No.: US11264239B2Publication Date: 2022-03-01
- Inventor: Hiroki Tanaka , Aleksandar Aleksov , Sri Ranga Sai Boyapati , Robert A. May , Kristof Darmawikarta
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt P.C.
- Main IPC: H01L21/027
- IPC: H01L21/027 ; H01L23/00 ; H01L23/485

Abstract:
Techniques that can assist with fabricating a semiconductor package that includes a zero misalignment-via (ZMV) and/or a trace formed using a polarization process are described. The disclosed techniques can result in creation of ZMVs and/or traces between the ZMVs using a process comprising application of polarized light to one or more resist layers (e.g., a photoresist layer, etc.). One embodiment of a technique includes modulating an intensity of light applied to one or more resist layers by interaction of a light source with a photomask and at least one polarizer such that one or more patterns are created on the one or more resist layers. One embodiment of another technique includes creating patterns on one or more resist layers with different types of polarized light formed from a photomask and at least one polarizer. The disclosed techniques can assist with reducing manufacturing costs, reducing development time, and increasing I/O density.
Information query
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