Invention Grant
- Patent Title: Semiconductor device having metal interconnects with different thicknesses
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Application No.: US16074142Application Date: 2016-04-01
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Publication No.: US11264329B2Publication Date: 2022-03-01
- Inventor: Kinyip Phoa , Jui-Yen Lin , Nidhi Nidhi , Chia-Hong Jan
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Trop, Pruner & Hu, P.C.
- International Application: PCT/US2016/025460 WO 20160401
- International Announcement: WO2017/171825 WO 20171005
- Main IPC: H01L23/538
- IPC: H01L23/538 ; H01L21/768

Abstract:
An apparatus includes a first metal layer, a second metal layer and a dielectric material. The first metal layer has a first thickness and a second thickness less than the first thickness, and the first metal layer comprises a first interconnect having a first thickness. The dielectric material extends between the first and second metal layers and directly contacts the first and second metal layers. The dielectric material includes a via that extends through the dielectric material. A metal material of the via directly contacts the first interconnect and the second metal layer.
Public/Granted literature
- US20210074642A1 SEMICONDUCTOR DEVICE HAVING METAL INTERCONNECTS WITH DIFFERENT THICKNESSES Public/Granted day:2021-03-11
Information query
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