Invention Grant
- Patent Title: Vertical memory device
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Application No.: US16270570Application Date: 2019-02-07
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Publication No.: US11264401B2Publication Date: 2022-03-01
- Inventor: Jun Hyoung Kim , Kwang Soo Kim , Seok Cheon Baek , Geun Won Lim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2018-0095582 20180816
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11582 ; H01L27/11575 ; H01L27/11573 ; H01L27/11548 ; H01L27/11524 ; H01L27/11529 ; H01L27/1157

Abstract:
A vertical memory device includes a substrate having a peripheral circuit structure, first gate patterns having first gate pad regions stacked vertically from the substrate, vertical channel structures penetrating the first gate patterns, first gate contact structures each extending vertically to a corresponding first gate pad region, mold patterns stacked vertically from the substrate, the mold patterns each being positioned at the same height from the substrate with a corresponding gate pattern, peripheral contact structures penetrating the mold patterns to be connected to the peripheral circuit structure, a first block separation structure disposed between the first gate contact structures and the peripheral contact structures, and a first peripheral circuit connection wiring extending across the first block separation structure to connect one of the first gate contact structures to one of the peripheral contact structures.
Public/Granted literature
- US20200058671A1 VERTICAL MEMORY DEVICE Public/Granted day:2020-02-20
Information query
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