Invention Grant
- Patent Title: Multiple fin finFET with low-resistance gate structure
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Application No.: US16883492Application Date: 2020-05-26
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Publication No.: US11264463B2Publication Date: 2022-03-01
- Inventor: Guillaume Bouche , Andy Chih-Hung Wei
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams Morgan, P.C.
- Main IPC: H01L29/161
- IPC: H01L29/161 ; H01L29/16 ; H01L23/482 ; H01L29/417 ; H01L29/66 ; H01L29/78

Abstract:
Embodiments of the present invention provide a multiple fin field effect transistor (finFET) with low-resistance gate structure. A metallization line is formed in parallel with the gate, and multiple contacts are formed over the fins which connect the metallization line to the gate. The metallization line provides reduced gate resistance, which allows fewer transistors to be used for providing In-Out (IO) functionality, thereby providing space savings that enable an increase in circuit density.
Public/Granted literature
- US20200286998A1 MULTIPLE FIN FINFET WITH LOW-RESISTANCE GATE STRUCTURE Public/Granted day:2020-09-10
Information query
IPC分类: