Invention Grant
- Patent Title: MEMS sensor structure comprising mechanically preloaded suspension springs
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Application No.: US16928851Application Date: 2020-07-14
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Publication No.: US11267694B2Publication Date: 2022-03-08
- Inventor: Eric Hennes , Alessandro Bertolini , Johannes Franciscus Van Den Brand
- Applicant: Stichting VU-VUMC , FOM-Nikhef
- Applicant Address: NL Amsterdam; NL Amsterdam
- Assignee: Stichting VU-VUMC,FOM-Nikhef
- Current Assignee: Stichting VU-VUMC,FOM-Nikhef
- Current Assignee Address: NL Amsterdam; NL Amsterdam
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Steven M. Koehler
- Priority: NL2012967 20140606
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G01P15/13 ; G01P15/08 ; G01P15/09 ; G01P15/125
Abstract:
A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to said support structure; and, a proof mass flexibly suspended by said suspension springs; wherein at least one of said suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass.
Public/Granted literature
- US20200369513A1 MEMS SENSOR STRUCTURE COMPRISING MECHANICALLY PRELOADED SUSPENSION SPRINGS Public/Granted day:2020-11-26
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