Invention Grant
- Patent Title: Film-shaped firing material and film-shaped firing material with support sheet
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Application No.: US16646546Application Date: 2018-09-04
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Publication No.: US11267992B2Publication Date: 2022-03-08
- Inventor: Isao Ichikawa , Hidekazu Nakayama , Akinori Sato
- Applicant: LINTEC CORPORATION
- Applicant Address: JP Tokyo
- Assignee: LINTEC CORPORATION
- Current Assignee: LINTEC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Nixon & Vanderhye P.C.
- Priority: JPJP2017-177653 20170915,JPJP2018-094575 20180516,JPJP2018-098014 20180522
- International Application: PCT/JP2018/032763 WO 20180904
- International Announcement: WO2019/054237 WO 20190321
- Main IPC: C09J7/10
- IPC: C09J7/10 ; C09J11/04 ; H01L21/683 ; H01L21/78 ; H01L23/00

Abstract:
The present invention provides a film-shaped firing material 1 including sinterable metal particles 10, and a binder component 20, in which a content of the sinterable metal particles 10 is in a range of 15% to 98% by mass, a content of the binder component 20 is in a range of 2% to 50% by mass, a tensile elasticity of the film-shaped firing material at 60° C. is in a range of 4.0 to 10.0 MPa, and a breaking elongation thereof at 60° C. is 500% or greater; and a film-shaped firing material with a support sheet including the film-shaped firing material 1 which contains sinterable metal particles and a binder component, and a support sheet 2 which is provided on at least one side of the film-shaped firing material, in which an adhesive force (a2) of the film-shaped firing material to the support sheet is smaller than an adhesive force (a1) of the film-shaped firing material to a semiconductor wafer, the adhesive force (a1) is 0.1 N/25 mm or greater, and the adhesive force (a2) is in a range of 0.1 N/25 mm to 0.5 N/25 mm.
Public/Granted literature
- US20200277515A1 FILM-SHAPED FIRING MATERIAL AND FILM-SHAPED FIRING MATERIAL WITH SUPPORT SHEET Public/Granted day:2020-09-03
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