发明授权
- 专利标题: Photonic IC chip
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申请号: US16821370申请日: 2020-03-17
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公开(公告)号: US11269141B2公开(公告)日: 2022-03-08
- 发明人: Frédéric Boeuf , Luca Maggi
- 申请人: STMicroelectronics S.r.l. , STMicroelectronics (Crolles 2) SAS
- 申请人地址: IT Agrate Brianza; FR Crolles
- 专利权人: STMicroelectronics S.r.l.,STMicroelectronics (Crolles 2) SAS
- 当前专利权人: STMicroelectronics S.r.l.,STMicroelectronics (Crolles 2) SAS
- 当前专利权人地址: IT Agrate Brianza; FR Crolles
- 代理机构: Slater Matsil, LLP
- 优先权: FR1903064 20190325
- 主分类号: G02B6/124
- IPC分类号: G02B6/124 ; G02B6/34 ; G02B6/43 ; G02B6/30 ; G02B6/12 ; G02B6/136
摘要:
A photonic integrated circuit chip includes vertical grating couplers defined in a first layer. Second insulating layers overlie the vertical grating coupler and an interconnection structure with metal levels is embedded in the second insulating layers. A cavity extends in depth through the second insulating layers all the way to an intermediate level between the couplers and the metal level closest to the couplers. The cavity has lateral dimensions such that the cavity is capable of receiving a block for holding an array of optical fibers intended to be optically coupled to the couplers.
公开/授权文献
- US20200310027A1 PHOTONIC IC CHIP 公开/授权日:2020-10-01
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