Invention Grant
- Patent Title: Substrate transport apparatus
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Application No.: US15110130Application Date: 2015-01-16
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Publication No.: US11273558B2Publication Date: 2022-03-15
- Inventor: Robert T. Caveney
- Applicant: BROOKS AUTOMATION, INC.
- Applicant Address: US MA Chelmsford
- Assignee: BROOKS AUTOMATION, INC.
- Current Assignee: BROOKS AUTOMATION, INC.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- International Application: PCT/US2015/011764 WO 20150116
- International Announcement: WO2015/109189 WO 20150723
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B25J18/04

Abstract:
A transport apparatus including a frame, a drive section connected to the frame, the drive section having at least one drive axis, at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with respect to the at least one arm, and a bearing connected to the frame and the end effector, the bearing defining a guideway that defines the at least one degree of freedom axis.
Public/Granted literature
- US20160325440A1 SUBSTRATE TRANSPORT APPARATUS Public/Granted day:2016-11-10
Information query
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