Invention Grant
- Patent Title: Integrated circuits and methods for forming thin film crystal layers
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Application No.: US16221798Application Date: 2018-12-17
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Publication No.: US11276644B2Publication Date: 2022-03-15
- Inventor: Carl Naylor , Ashish Agrawal , Kevin Lin , Abhishek Sharma , Mauro Kobrinsky , Christopher Jezewski , Urusa Alaan
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: 2SPL Patent Attorneys PartG mbB
- Agent Kieran O'Leary
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L29/45 ; H01L29/786 ; H01L23/522 ; H01L21/768 ; H01L29/66 ; H01L21/02 ; H01L29/24 ; H01L21/285

Abstract:
An aspect of the disclosure relates to an integrated circuit. The integrated circuit includes a first electrically conductive structure, a thin film crystal layer located on the first electrically conductive structure, and a second electrically conductive structure including metal e.g. copper. The second electrically conductive structure is located on the thin film crystal layer. The first electrically conductive structure is electrically connected to the second electrically conductive structure through the thin film crystal layer. The thin film crystal layer may be provided as a copper diffusion barrier.
Information query
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