- 专利标题: Semiconductor memory device
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申请号: US16567153申请日: 2019-09-11
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公开(公告)号: US11282782B2公开(公告)日: 2022-03-22
- 发明人: Hisashi Kato
- 申请人: KIOXIA CORPORATION
- 申请人地址: JP Minato-ku
- 专利权人: KIOXIA CORPORATION
- 当前专利权人: KIOXIA CORPORATION
- 当前专利权人地址: JP Minato-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JPJP2019-051563 20190319
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L23/528 ; H01L27/11582 ; H01L27/1157
摘要:
According to one embodiment, a semiconductor memory device includes first and second conductor layers, a first pillar, a first contact, and a source line drive circuit. The first pillar is passing through the second conductor layers. The first pillar includes a first semiconductor layer and a second insulator layer. The first semiconductor layer includes a side surface partially in contact with the first conductor layer. The first contact is passing through the second conductor layers. The first contact includes a third conductor layer and a third insulator layer. The third conductor layer includes a side surface partially in contact with the first conductor layer. The source line drive circuit is electrically coupled to the first conductor layer via the first contact.
公开/授权文献
- US20200303300A1 SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2020-09-24
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