- 专利标题: High performance accelerometer
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申请号: US16794952申请日: 2020-02-19
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公开(公告)号: US11287443B2公开(公告)日: 2022-03-29
- 发明人: Sriraman Dakshinamurthy , Vadim Tsinker , Matthew Julian Thompson
- 申请人: INVENSENSE, INC.
- 申请人地址: US CA San Jose
- 专利权人: INVENSENSE, INC.
- 当前专利权人: INVENSENSE, INC.
- 当前专利权人地址: US CA San Jose
- 代理机构: Haley Guiliano LLP
- 代理商 Joshua Van Hoven
- 主分类号: G01P15/13
- IPC分类号: G01P15/13 ; G01P15/08
摘要:
A MEMS accelerometer includes a suspended spring-mass system that has a frequency response to accelerations experienced over a range of frequencies. The components of the suspended spring-mass system such as the proof masses respond to acceleration in a substantially uniform manner at frequencies that fall within a designed bandwidth for the MEMS accelerometer. Digital compensation circuitry compensates for motion of the proof masses outside of the designed bandwidth, such that the functional bandwidth of the MEMS accelerometer is significantly greater than the designed bandwidth.
公开/授权文献
- US20200264210A1 HIGH PERFORMANCE ACCELEROMETER 公开/授权日:2020-08-20
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