Invention Grant
- Patent Title: Semiconductor structure with low defect
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Application No.: US15720366Application Date: 2017-09-29
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Publication No.: US11289477B2Publication Date: 2022-03-29
- Inventor: Blandine Duriez , Georgios Vellianitis
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/78 ; H01L29/66 ; H01L29/06 ; H01L21/311 ; H01L29/786 ; H01L29/423

Abstract:
Semiconductor structures are provided. The semiconductor structure includes a fin structure formed over a substrate and an isolation structure formed around the fin structure. The semiconductor structure further includes a nanowire structure formed over the fin structure and a gate structure formed around the nanowire structure. In addition, a bottommost of the nanowire structure is lower than a top surface of the isolation structure.
Public/Granted literature
- US20180026034A1 SEMICONDUCTOR STRUCTURE WITH LOW DEFECT Public/Granted day:2018-01-25
Information query
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