Invention Grant
- Patent Title: Semiconductor device including fin field effect transistor
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Application No.: US16382439Application Date: 2019-04-12
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Publication No.: US11289478B2Publication Date: 2022-03-29
- Inventor: Seonghwa Park , Hongbae Park , Jaehyun Lee , Jonghan Lee , Dabok Jeong , Minseok Jo
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR10-2018-0106428 20180906
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/06 ; H01L29/78 ; H01L29/66 ; H01L21/8234 ; H01L21/308

Abstract:
A semiconductor device includes a first gate pattern and a second gate pattern on a substrate, the first gate pattern and the second gate pattern being spaced apart from each other, and a separation pattern that separates the first gate pattern and the second gate pattern from each other. The first gate pattern includes a first high-k dielectric pattern and a first metal-containing pattern on the first high-k dielectric pattern, the first metal-containing pattern covering a sidewall of the first high-k dielectric pattern. The second gate pattern includes a second high-k dielectric pattern and a second metal-containing pattern on the second high-k dielectric pattern, and the separation pattern is in direct contact with the first metal-containing pattern and spaced apart from the first high-k dielectric pattern.
Public/Granted literature
- US20200083220A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-03-12
Information query
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