Invention Grant
- Patent Title: Determining locations of suspected defects
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Application No.: US16808111Application Date: 2020-03-03
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Publication No.: US11301987B2Publication Date: 2022-04-12
- Inventor: Ofir Greenberg , Dan Segal , Dae Hwan Youn , Tal Ben-Shlomo
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06T7/77
Abstract:
A method, a non-transitory computer readable medium and a detection system for determining locations of suspected defects of a substrate.
Public/Granted literature
- US20210279848A1 DETERMINING LOCATIONS OF SUSPECTED DEFECTS Public/Granted day:2021-09-09
Information query
