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公开(公告)号：US20210279848A1
公开(公告)日：2021-09-09
申请号：US16808111
申请日：2020-03-03
Applicant: Applied Materials Israel Ltd.
Inventor： Ofir Greenberg , Dan Segal , Dae Hwan Youn , Tal Ben-Shlomo
Abstract: A method, a non-transitory computer readable medium and a detection system for determining locations of suspected defects of a substrate.
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公开(公告)号：US11301987B2
公开(公告)日：2022-04-12
申请号：US16808111
申请日：2020-03-03
Applicant: Applied Materials Israel Ltd.
Inventor： Ofir Greenberg , Dan Segal , Dae Hwan Youn , Tal Ben-Shlomo
Abstract: A method, a non-transitory computer readable medium and a detection system for determining locations of suspected defects of a substrate.
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