- Patent Title: Power semiconductor apparatus and fabrication method for the same
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Application No.: US16676011Application Date: 2019-11-06
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Publication No.: US11302665B2Publication Date: 2022-04-12
- Inventor: Takukazu Otsuka , Seita Iwahashi , Maiko Hatano , Ryuta Watanabe , Katsuhiko Yoshihara
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JPJP2017-093941 20170510,JPJP2017-106445 20170530,JPJP2017-112433 20170607
- Main IPC: H01L23/495
- IPC: H01L23/495 ; H01L23/00

Abstract:
The power semiconductor apparatus includes: a semiconductor device 401; a bonding layer on chip 416 disposed on an upper surface of the semiconductor device; and a metal lead 419 disposed on the upper surface of the semiconductor device and bonded to the bonding layer on chip, wherein the metal lead 420 has a three-laminated structure including: a second metal layer 420b having a CTE equal to or less than 5×10−6/° C., for example; and a first metal layer 420a and a third metal layer 420c sandwiching the second metal layer and having a CTE equal to or greater than the CTE of the second metal layer. Provided is a power semiconductor apparatus capable of improving reliability thereof by reducing a thermal stress to a bonding layer between a semiconductor power device and a metal lead positioned on an upper surface thereof, and reducing a resistance of the metal lead.
Public/Granted literature
- US20200075529A1 POWER SEMICONDUCTOR APPARATUS AND FABRICATION METHOD FOR THE SAME Public/Granted day:2020-03-05
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