Invention Grant
- Patent Title: Water proofing and water detection schemes for MEMS-based environmental sensing devices
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Application No.: US16831706Application Date: 2020-03-26
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Publication No.: US11305984B2Publication Date: 2022-04-19
- Inventor: Krishna Prasad Vummidi Murali , Kuolung Lei , Richard Yeh , Yun X. Ma
- Applicant: Apple Inc.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: Baker & Hostetler LLP
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00
Abstract:
A waterproofed environmental sensing device with water detection provisions includes an environmental sensor to sense one or more environmental properties. The device further includes an electronic integrated circuit implemented on a substrate and coupled to the environmental sensor via a wire bonding. An air-permeable cap structure is formed over the environmental sensor, and a protective layer is formed over the wire bonding to protect the wire bonding against damage.
Public/Granted literature
- US20200223686A1 WATER PROOFING AND WATER DETECTION SCHEMES FOR MEMS-BASED ENVIRONMENTAL SENSING DEVICES Public/Granted day:2020-07-16
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