Invention Grant
- Patent Title: Scale and manufacturing method of the same
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Application No.: US16220368Application Date: 2018-12-14
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Publication No.: US11307058B2Publication Date: 2022-04-19
- Inventor: Toshihiko Aoki
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Rankin, Hill & Clark LLP
- Priority: JPJP2017-241624 20171218
- Main IPC: G01D5/347
- IPC: G01D5/347 ; G02B5/18 ; G01D5/38 ; G02B7/00

Abstract:
A scale includes: a substrate that is made of low expansion glass of which a thermal expansion coefficient is 1×10−7/K or less; and scale gratings having a plurality of gratings that are arranged on a first face of the substrate at a predetermined interval and are made of a transparent inorganic material of which a thermal expansion coefficient is more than 1×10−7/K.
Public/Granted literature
- US20190186957A1 SCALE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2019-06-20
Information query
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