公开(公告)号：US11768322B2

公开(公告)日：2023-09-26

申请号：US16907942

申请日：2020-06-22

Applicant: MITUTOYO CORPORATION

Inventor： Toshihiko Aoki ,  Kosaku Miyake

IPC: G02B5/18

CPC classification number: G02B5/1814 ,  G02B5/1852 ,  G02B2005/1804

Abstract: A grating part includes a first transparent substrate having an optical grating on a first principal surface and a second transparent substrate having an optical grating on a first principal surface; a second principal surface of the first substrate on an opposite side from the first principal surface and a second principal surface of the second substrate on an opposite side from the first principal surface are bonded.

公开(公告)号：US20220268601A1

公开(公告)日：2022-08-25

申请号：US17668055

申请日：2022-02-09

Applicant: MITUTOYO CORPORATION

Inventor： Toshihiko Aoki

IPC: G01D5/20

Abstract: A scale includes a base material, an intermediate layer of soft magnetic material formed on one surface of the base material and roughened on face thereof opposite to the base material, and a scale pattern of a conductor formed on the intermediate layer.

公开(公告)号：US20130127644A1

公开(公告)日：2013-05-23

申请号：US13683282

申请日：2012-11-21

Applicant: Mitutoyo Corporation

Inventor： Toshihiko Aoki ,  Fujio Maeda ,  Michihiko Togashi

IPC: H03M1/22

CPC classification number: H03M1/22 ,  G01D5/34707

Abstract: A scale of a photoelectric encoder includes a base member which is conductive and has a light reflection surface, and light absorptive black gratings which are arranged at a prescribed pitch on the base member.

Abstract translation: 光电编码器的标尺包括导电并具有光反射表面的基底构件和在基底构件上以规定间距排列的光吸收黑色光栅。

公开(公告)号：US20220082411A1

公开(公告)日：2022-03-17

申请号：US17395805

申请日：2021-08-06

Applicant: MITUTOYO CORPORATION

Inventor： Toshihiko Aoki

IPC: G01D5/20

Abstract: A scale includes a substrate, a scale pattern that has conductivity and is provided on a first main face of the substrate, and a conductive film that is provided on a second main face of the substrate, a base material of the conductive film being a resin material, a conductive material being added to the base material.

公开(公告)号：US20210381859A1

公开(公告)日：2021-12-09

申请号：US17218664

申请日：2021-03-31

Applicant: MITUTOYO CORPORATION

Inventor： Toshihiko Aoki ,  Kosaku Miyake

IPC: G01D5/38 ,  G01D5/347

Abstract: A scale includes a substrate, a metal layer of Ni formed on one principal surface of the substrate, and a scale grating formed on the metal layer. A plurality of gratings of Cr are disposed at a predetermined interval in the scale grating.

公开(公告)号：US11054286B2

公开(公告)日：2021-07-06

申请号：US16227573

申请日：2018-12-20

Applicant: MITUTOYO CORPORATION

Inventor： Toshihiko Aoki

IPC: G01D5/347

Abstract: A scale includes: a substrate; scale gratings that are formed on a face of the substrate and has a plurality of metal gratings at a predetermined interval; and an inorganic transparent member that is provided between the plurality of metal gratings, wherein at least a surface of the face of the substrate is made of a metal, and wherein the scale gratings and the inorganic transparent member are exposed to atmosphere.

公开(公告)号：US20190204118A1

公开(公告)日：2019-07-04

申请号：US16227573

申请日：2018-12-20

Applicant: MITUTOYO CORPORATION

Inventor： Toshihiko Aoki

IPC: G01D5/347

CPC classification number: G01D5/34707

Abstract: A scale includes: a substrate; scale gratings that are formed on a face of the substrate and has a plurality of metal gratings at a predetermined interval; and an inorganic transparent member that is provided between the plurality of metal gratings, wherein at least a surface of the face of the substrate is made of a metal, and wherein the scale gratings and the inorganic transparent member are exposed to atmosphere.

公开(公告)号：US20190186957A1

公开(公告)日：2019-06-20

申请号：US16220368

申请日：2018-12-14

Applicant: MITUTOYO CORPORATION

Inventor： Toshihiko Aoki

IPC: G01D5/347 ,  G01D5/38 ,  G02B5/18

CPC classification number: G01D5/34707 ,  G01D5/38 ,  G02B5/1857 ,  G02B5/1861

Abstract: A scale includes: a substrate that is made of low expansion glass of which a thermal expansion coefficient is 1×10−7/K or less; and scale gratings having a plurality of gratings that are arranged on a first face of the substrate at a predetermined interval and are made of a transparent inorganic material of which a thermal expansion coefficient is more than 1×10−7/K.

公开(公告)号：US11747173B2

公开(公告)日：2023-09-05

申请号：US17668055

申请日：2022-02-09

Applicant: MITUTOYO CORPORATION

Inventor： Toshihiko Aoki

IPC: G01D5/20

CPC classification number: G01D5/20

Abstract: A scale includes a base material, an intermediate layer of soft magnetic material formed on one surface of the base material and roughened on face thereof opposite to the base material, and a scale pattern of a conductor formed on the intermediate layer.

公开(公告)号：US11307058B2

公开(公告)日：2022-04-19

申请号：US16220368

申请日：2018-12-14

Applicant: MITUTOYO CORPORATION

Inventor： Toshihiko Aoki

IPC: G01D5/347 ,  G02B5/18 ,  G01D5/38 ,  G02B7/00

Abstract: A scale includes: a substrate that is made of low expansion glass of which a thermal expansion coefficient is 1×10−7/K or less; and scale gratings having a plurality of gratings that are arranged on a first face of the substrate at a predetermined interval and are made of a transparent inorganic material of which a thermal expansion coefficient is more than 1×10−7/K.