Invention Grant
- Patent Title: Method of post optical proximity correction (OPC) printing verification by machine learning
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Application No.: US16907767Application Date: 2020-06-22
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Publication No.: US11308256B2Publication Date: 2022-04-19
- Inventor: Hung-Chun Wang , Cheng Kun Tsai , Wen-Chun Huang , Wei-Chen Chien , Chi-Ping Liu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: G06F7/50
- IPC: G06F7/50 ; G06F30/398 ; G03F1/36 ; G06F30/20

Abstract:
Implementations of the disclosure provide a method of fabricating an integrated circuit (IC). The method includes receiving an IC design layout; performing optical proximity correction (OPC) process to the IC design layout to produce a corrected IC design layout; and verifying the corrected IC design layout using a machine learning algorithm. The post OPC verification includes using the machine learning algorithm to identify one or more features of the corrected IC design layout; comparing the one or more identified features to a database comprising a plurality of features; and verifying the corrected IC design layout based on labels in the database associated with the plurality of features.
Public/Granted literature
- US20200320246A1 METHOD OF POST OPTICAL PROXIMITY CORRECTION (OPC) PRINTING VERIFICATION BY MACHINE LEARNING Public/Granted day:2020-10-08
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