Invention Grant
- Patent Title: Wafer container and method for holding wafer
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Application No.: US14988504Application Date: 2016-01-05
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Publication No.: US11315815B2Publication Date: 2022-04-26
- Inventor: Po-Hsun Tseng , Yan-Hong Liu , Wen-Han Tan , Hung-Wen Chen
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/322
Abstract:
A wafer container includes at least one shelf and a frame. The shelf is capable of holding at least one wafer, and has at least one opening therein. The opening is at least partially exposed by the wafer when the wafer is hold by the shelf. The frame carries the shelf and allows access to the shelf.
Public/Granted literature
- US20170194180A1 WAFER CONTAINER AND METHOD FOR HOLDING WAFER Public/Granted day:2017-07-06
Information query
IPC分类:
