Invention Grant
- Patent Title: Skip via connection between metallization levels
-
Application No.: US16813162Application Date: 2020-03-09
-
Publication No.: US11315827B2Publication Date: 2022-04-26
- Inventor: Huai Huang , Lawrence A. Clevenger , Hosadurga Shobha , Christopher J. Penny , Nicholas Anthony Lanzillo
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, PC
- Agent Randall Bluestone
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/48

Abstract:
A method for fabricating a semiconductor device including a skip via connection between metallization levels includes subtractively etching first conductive material to form a first via and a skip via on a first conductive line. The first via and the first conductive line are included within a first metallization level. The skip via is used to connect the first metallization level to a third metallization level above a second metallization level. The method further includes forming, on the first via from second conductive material, a second via disposed on a second conductive line. The second via and the second conductive line are included within the second metallization level.
Public/Granted literature
- US20210280456A1 SKIP VIA CONNECTION BETWEEN METALLIZATION LEVELS Public/Granted day:2021-09-09
Information query
IPC分类: