Invention Grant
- Patent Title: Metal layer patterning for minimizing mechanical stress in integrated circuit packages
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Application No.: US16897036Application Date: 2020-06-09
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Publication No.: US11322465B2Publication Date: 2022-05-03
- Inventor: Kathryn R. Holland , Marc L. Tarabbia , Yaoyu Pang , Alexander Barr
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: GB Edinburgh
- Assignee: Cirrus Logic International Semiconductor Ltd.
- Current Assignee: Cirrus Logic International Semiconductor Ltd.
- Current Assignee Address: GB Edinburgh
- Agency: Jackson Walker L.L.P.
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
A method may include forming a metal pattern in a metal layer of a fabricated integrated circuit device and under a target bump of the fabricated integrated circuit device, wherein the metal pattern has an inner shape and an outer field such that a void space in the metal layer is created between the inner shape and the outer field and approximately centering the void space on an outline of an under-bump metal formed under the target bump with a keepout distance from the inner shape and the outer field on either side of the outline such that the metal minimizes local variations in mechanical stress on underlying structures within the fabricated integrated circuit device.
Public/Granted literature
- US20210066221A1 METAL LAYER PATTERNING FOR MINIMIZING MECHANICAL STRESS IN INTEGRATED CIRCUIT PACKAGES Public/Granted day:2021-03-04
Information query
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