- Patent Title: Anamorphic illumination optics for a MEMS spatial light modulator
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Application No.: US16380898Application Date: 2019-04-10
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Publication No.: US11333894B2Publication Date: 2022-05-17
- Inventor: Yoshimi Hashimoto
- Applicant: SILICON LIGHT MACHINES CORPORATION
- Applicant Address: US CA Sunnyvale
- Assignee: SILICON LIGHT MACHINES CORPORATION
- Current Assignee: SILICON LIGHT MACHINES CORPORATION
- Current Assignee Address: US CA Sunnyvale
- Agent William Nuttle
- Main IPC: G02B27/09
- IPC: G02B27/09 ; H01S5/00 ; G02B26/08 ; G02B27/42 ; B33Y30/00 ; G03F7/00

Abstract:
A system including two dimensional, microelectromechanical system (MEMS) based spatial light modulators and anamorphic optics for improved contrast is provided. Generally, the system comprises an array of modulators having a plurality of pixels along a longitudinal axis, each pixel comprising a plurality of modulators along a transverse axis of the array. An illumination source including a laser and anamorphic optics for focuses light from the laser onto the array, and imaging optics focus modulated light from the array onto an image plane. The anamorphic optics are configured to provide a transverse numerical aperture (NA) along the transverse axis of the array that is smaller than a diffraction angle of the modulated light reflected from the array along a transverse axis of the image plane, and a longitudinal NA along the longitudinal axis of the array that is greater than the transverse NA. Other embodiments are also provided.
Public/Granted literature
- US20190235256A1 Anamorphic Illumination Optics For A MEMS Spatial Light Modulator Public/Granted day:2019-08-01
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