公开(公告)号：US11333894B2

公开(公告)日：2022-05-17

申请号：US16380898

申请日：2019-04-10

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Yoshimi Hashimoto

IPC: G02B27/09 ,  H01S5/00 ,  G02B26/08 ,  G02B27/42 ,  B33Y30/00 ,  G03F7/00

Abstract: A system including two dimensional, microelectromechanical system (MEMS) based spatial light modulators and anamorphic optics for improved contrast is provided. Generally, the system comprises an array of modulators having a plurality of pixels along a longitudinal axis, each pixel comprising a plurality of modulators along a transverse axis of the array. An illumination source including a laser and anamorphic optics for focuses light from the laser onto the array, and imaging optics focus modulated light from the array onto an image plane. The anamorphic optics are configured to provide a transverse numerical aperture (NA) along the transverse axis of the array that is smaller than a diffraction angle of the modulated light reflected from the array along a transverse axis of the image plane, and a longitudinal NA along the longitudinal axis of the array that is greater than the transverse NA. Other embodiments are also provided.

公开(公告)号：US10574954B2

公开(公告)日：2020-02-25

申请号：US16209376

申请日：2018-12-04

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Yoshimi Hashimoto

IPC: H04N9/31 ,  G02B26/10 ,  G02B13/00 ,  G02B27/00 ,  G02B26/08

Abstract: A multi-beam scanning system and methods of operating the same to compensate for distortion are provided. Generally, the method involves illuminating a spatial light modulator including SLM pixels arranged in parallel, each pixel including a multiple address pixels. Drive signals including image data are provided to the pixels to generate beams of modulated light reflected therefrom, which is scanned to a linear swath of a two-dimensional imaging plane using a collimate lens, a scan mirror moved about a first axis, and an imaging lens. The swath is scanned across the imaging plane in a direction orthogonal to a long axis of the swath by moving the scan mirror about a second axis. To compensate for distortion along the long axis of the swath compensated image data is provided to at least some of the address pixels generating beams of modulated light distal from an optical axis of the imaging lens.