Invention Grant

Linear stage
Abstract:
Afforded is a linear stage including first, second, and third supporting parts disposed on a supporting flat surface, a first shaft supported by the first and second supporting parts and extending in a first direction, a second shaft supported by the third supporting part and provided extending in the first direction, and a translating carriage translated in the first direction, guided by the first shaft and the second shaft. At least one supporting part among the first, second, and third supporting parts supports the shaft supported by that supporting part in a way such as to be displaceable in a second direction orthogonal to the first direction and parallel to the supporting flat surface.
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