公开(公告)号：US20220221881A1

公开(公告)日：2022-07-14

申请号：US17575257

申请日：2022-01-13

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Marino Watanabe ,  Akira Kondo ,  Shinya Hamada ,  Tatsuya Yoshida

IPC: G05D7/06 ,  G05B19/416

Abstract: There is provided a control device that controls a controlled variable of a control target to a target value by controlling a flow rate of gas supplied to and discharged from the control target by a spool type flow control valve. The control device includes a controller that generates a spool position command of the spool type flow control valve, based on the target value, and a non-linear compensator that applies a correction for linearly compensating for non-linear flow rate characteristics of the spool type flow control valve to the generated spool position command, and outputs the command to the spool type flow control valve.

公开(公告)号：US11655832B2

公开(公告)日：2023-05-23

申请号：US17542010

申请日：2021-12-03

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Tatsuya Yoshida ,  Shinya Hamada

IPC: F15B9/09

CPC classification number: F15B9/09 ,  F15B2211/6336 ,  F15B2211/6656

Abstract: A control calculation device performs a calculation of compensating for a volume change amount of each pressure chamber caused by a positional change of a pressure receiving plate inside a cylinder chamber for each position command value applied to two servo amplifiers, outputs each of the compensated position command values to the two servo amplifiers, and executes origin positioning for a position of a slider in order to compensate for the volume change amount.

公开(公告)号：US20180023624A1

公开(公告)日：2018-01-25

申请号：US15714601

申请日：2017-09-25

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Tatsuya Yoshida ,  Kazutoshi Sakaki

IPC: F16C32/06 ,  F16C29/00

CPC classification number: F16C32/0614 ,  F16C29/005 ,  F16C29/025 ,  F16C32/06 ,  F16C32/0666 ,  F16C33/74 ,  F16C2202/08 ,  F16C2206/00 ,  F16C2223/60 ,  F16C2300/62 ,  F16J15/0806

Abstract: A static pressure gas bearing used in a vacuum environment includes a guide shaft and a tubular slider which is movable in an axial direction in a state where the guide shaft is accommodated therein. The slider is configured by fastening a plurality of plate-shaped members. A film formed of a soft material having a smaller elastic modulus than that of each of the plate-shaped members is interposed between joint surfaces of the plate-shaped members.

公开(公告)号：US20220186752A1

公开(公告)日：2022-06-16

申请号：US17546711

申请日：2021-12-09

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Tatsuya Yoshida ,  Daisuke Shinohira

IPC: F15B9/09 ,  F16K11/07 ,  F16K37/00

Abstract: There is provided a spool type flow control valve including a sleeve in which a supply port, a control port, and an exhaust port are formed, and a spool accommodated to be movable in an axial direction inside the sleeve and including a valve body. The valve body controls an opening area of the control port so that a flow rate is controlled. A difference between a maximum value and a minimum value of an internal leakage amount which is a flow rate at which a gas supplied from the supply port is discharged from the exhaust port in a state where the control port is shut off is equal to or smaller than a predetermined threshold.

公开(公告)号：US11339914B2

公开(公告)日：2022-05-24

申请号：US16145216

申请日：2018-09-28

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Tatsuya Yoshida

IPC: F16M11/04 ,  G12B5/00 ,  F16M11/18

Abstract: Afforded is a linear stage including first, second, and third supporting parts disposed on a supporting flat surface, a first shaft supported by the first and second supporting parts and extending in a first direction, a second shaft supported by the third supporting part and provided extending in the first direction, and a translating carriage translated in the first direction, guided by the first shaft and the second shaft. At least one supporting part among the first, second, and third supporting parts supports the shaft supported by that supporting part in a way such as to be displaceable in a second direction orthogonal to the first direction and parallel to the supporting flat surface.

公开(公告)号：US20180010709A1

公开(公告)日：2018-01-11

申请号：US15713159

申请日：2017-09-22

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Tatsuya Yoshida

IPC: F16K31/12 ,  F15B21/04 ,  F15B15/24

CPC classification number: F16K31/12 ,  F15B15/24 ,  F15B21/044 ,  F16C29/025 ,  F16C32/0614

Abstract: An actuator includes a guide that extends in one direction and a slider that is movable in an axial direction with respect to the guide. Either the guide or the slider has a recessed cross-section, and the slider is guided by the guide while the other of the guide and the slider is restrained by three surfaces constituting the recessed cross-section.

公开(公告)号：US20220178389A1

公开(公告)日：2022-06-09

申请号：US17542010

申请日：2021-12-03

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Tatsuya Yoshida ,  Shinya Hamada

IPC: F15B9/09

Abstract: A control calculation device performs a calculation of compensating for a volume change amount of each pressure chamber caused by a positional change of a pressure receiving plate inside a cylinder chamber for each position command value applied to two servo amplifiers, outputs each of the compensated position command values to the two servo amplifiers, and executes origin positioning for a position of a slider in order to compensate for the volume change amount.

公开(公告)号：US10371279B2

公开(公告)日：2019-08-06

申请号：US15713159

申请日：2017-09-22

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Tatsuya Yoshida

IPC: F16C29/02 ,  F16K31/12 ,  F16C32/06 ,  F15B15/24 ,  F15B21/044

Abstract: An actuator includes a guide that extends in one direction and a slider that is movable in an axial direction with respect to the guide. Either the guide or the slider has a recessed cross-section, and the slider is guided by the guide while the other of the guide and the slider is restrained by three surfaces constituting the recessed cross-section.