Invention Grant
- Patent Title: Methods and apparatus for calculating electromagnetic scattering properties of a structure
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Application No.: US16394738Application Date: 2019-04-25
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Publication No.: US11347151B2Publication Date: 2022-05-31
- Inventor: Markus Gerardus Martinus Maria Van Kraaij , Maxim Pisarenco , Richard Quintanilha
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP18172091 20180514
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G01N21/95 ; G01N21/956 ; G03F9/00

Abstract:
A method of calculating electromagnetic scattering properties of a structure represented as a nominal structure and a structural perturbation, has the steps: 1008 numerically solving a volume integral equation comprising a nominal linear system 1004 to determine a nominal vector field being independent with respect to the structural perturbation; 1010 using a perturbed linear system 1006 to determine an approximation of a vector field perturbation arising from the structural perturbation, by solving a volume integral equation or an adjoint linear system. Matrix-vector multiplication of a nominal linear system matrix convolution operator may be restricted to sub-matrices; and 1012 calculating electromagnetic scattering properties of the structure using the determined nominal vector field and the determined approximation of the vector field perturbation.
Information query
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