Invention Grant
- Patent Title: Laser interference device
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Application No.: US17197349Application Date: 2021-03-10
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Publication No.: US11353315B2Publication Date: 2022-06-07
- Inventor: Yuichiro Yokoyama
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JPJP2020-049329 20200319
- Main IPC: G01B9/02003
- IPC: G01B9/02003 ; G01B9/02015 ; G02B27/10

Abstract:
A laser interference device includes a measurement laser that outputs a laser beam, a beam splitter that divides the laser beam into a measurement laser beam and a frequency monitor laser beam, a reference laser that outputs a reference laser beam, a frequency detector that detects a beat frequency resulting from interference between the reference laser beam and the frequency monitor laser beam, a wavelength calculator that calculates a wavelength of the frequency monitor laser beam (a wavelength measurement value) on the basis of the beat frequency, a light detector that detects an interference light of the measurement light and the reference light of the measurement laser beam and outputs a light detection signal, and a displacement calculator that calculates a displacement of the measurement mirror by performing an arithmetic process based on the wavelength measurement value and the light detection signal.
Public/Granted literature
- US20210293523A1 LASER INTERFERENCE DEVICE Public/Granted day:2021-09-23
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