Invention Grant
- Patent Title: Frictionless forged aluminum alloy sputtering target with improved properties
-
Application No.: US15749720Application Date: 2016-07-26
-
Publication No.: US11359273B2Publication Date: 2022-06-14
- Inventor: Stephane Ferrasse , Suresh Sundarraj , Frank C. Alford , Jeffrey J. Schaefer , Susan D. Strothers
- Applicant: Honeywell International Inc.
- Applicant Address: US NJ Morris Plains
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morris Plains
- Agency: Faegre Drinker Biddle & Reath LLP
- International Application: PCT/US2016/043997 WO 20160726
- International Announcement: WO2017/023603 WO 20170209
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C22C21/00 ; B21J5/02 ; C22C21/12 ; C22F1/057

Abstract:
A sputtering target comprising a forged aluminum material having an average grain size between about 15 and 55 microns. The aluminum material has at least one of the following: a homogeneous texture with minimal texture banding as measured by banding factor B below about 0.01; a texture gradient H of less than 0.2; or either weak (200) texture or near random texture characterized by maximum intensity of inverse pole figure less than 3 times random in multiple directions.
Public/Granted literature
- US20180223420A1 FRICTIONLESS FORGED ALUMINUM ALLOY SPUTTERING TARGET WITH IMPROVED PROPERTIES Public/Granted day:2018-08-09
Information query
IPC分类: