Invention Grant
- Patent Title: Temperature calibration with band gap absorption method
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Application No.: US17021411Application Date: 2020-09-15
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Publication No.: US11359972B2Publication Date: 2022-06-14
- Inventor: Zhepeng Cong , Schubert S. Chu , Nyi O. Myo
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G01J5/53
- IPC: G01J5/53 ; G01J5/34 ; G01J5/80

Abstract:
A method and apparatus for calibration non-contact temperature sensors within a process chamber are described herein. The calibration of the non-contact temperature sensors includes the utilization of a band edge detector to determine the band edge absorption wavelength of a substrate. The band edge detector is configured to measure the intensity of a range of wavelengths and determines the actual temperature of a substrate based off the band edge absorption wavelength and the material of the substrate. The calibration method is automated and does not require human intervention or disassembly of a process chamber for each calibration.
Public/Granted literature
- US20220082445A1 TEMPERATURE CALIBRATION WITH BAND GAP ABSORPTION METHOD Public/Granted day:2022-03-17
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