Semiconductor electro-optical modulators which receives an input optical signal and provides a modulated output optical signal based on an input electrical signal are disclosed. The semiconductor electro-optical modulator may comprise at least one electrical transmission line adapted to carry the input electrical signal and a semiconductor electro-optical phase shifter waveguide electrically coupled to the at least one electrical transmission line. An optical path length of the semiconductor electro-optical phase shifter waveguide between a modulation begin plane of the semiconductor electro-optical modulator and a modulation end plane of the semiconductor electro-optical modulator may be greater than an electrical path length of the electrical transmission line between the modulation begin plane of the semiconductor electro-optical modulator and the modulation end plane of the semiconductor electro-optical modulator.