Invention Grant
- Patent Title: Light detection device
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Application No.: US16834121Application Date: 2020-03-30
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Publication No.: US11362127B2Publication Date: 2022-06-14
- Inventor: Atsushi Ishida , Noburo Hosokawa , Terumasa Nagano , Takashi Baba
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JP2016-147378 20160727
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/107 ; H01L31/0224

Abstract:
A photodetecting device includes a semiconductor substrate, a plurality of avalanche photodiodes each including a light receiving region disposed at a first principal surface side of the semiconductor substrate, the avalanche photodiodes being arranged two-dimensionally at the semiconductor substrate, and a through-electrode electrically connected to a corresponding light receiving region. The through-electrode is provided in a through-hole penetrating through the semiconductor substrate in an area where the plurality of avalanche photodiodes are arranged two-dimensionally. At the first principal surface side of the semiconductor substrate, a groove surrounding the through-hole is formed between the through-hole and the light receiving region adjacent to the through-hole. A first distance between an edge of the groove and an edge of the through-hole surrounded by the groove is longer than a second distance between the edge of the groove and an edge of the light receiving region adjacent to the through-hole surrounded by the groove.
Public/Granted literature
- US20200227464A1 LIGHT DETECTION DEVICE Public/Granted day:2020-07-16
Information query
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