Invention Grant
- Patent Title: Imprint mold, manufacturing method thereof, and imprint method
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Application No.: US16852201Application Date: 2020-04-17
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Publication No.: US11366385B2Publication Date: 2022-06-21
- Inventor: Toshiki Ito , Masayuki Nakajima , Kiyohito Yamamoto , Yuichiro Oguchi , Naoki Kiyohara
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JPJP2019-083329 20190424
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B29C33/42

Abstract:
An imprint mold includes a mesa portion projecting from a base material. The mesa portion includes a contact surface configured for contact with a curable composition made of an organic material, and a surface of a side wall at which the contact surface projects from the base material. A liquid repellent surface is formed on at least the surface of the side wall, the liquid repellent surface having a contact angle with respect to the curable composition being higher than a contact angle of the contact surface. The liquid repellent surface includes at least one type of compound selected from the group consisting of an oxide of an inorganic element, a fluoride of an inorganic element, and a nitride of an inorganic element.
Public/Granted literature
- US20200341370A1 IMPRINT MOLD, MANUFACTURING METHOD THEREOF, AND IMPRINT METHOD Public/Granted day:2020-10-29
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