公开(公告)号：US20220036540A1

公开(公告)日：2022-02-03

申请号：US17380087

申请日：2021-07-20

Applicant: CANON KABUSHIKI KAISHA

Inventor： Takahiro Nakayama ,  Yuichiro Oguchi

IPC: G06T7/00 ,  G06F3/14 ,  G06K9/00 ,  H04N7/18

Abstract: The present invention provides an information processing apparatus comprising: an obtainer configured to, in a process of supplying a curable composition onto a substrate or a mold and forming a film of the curable composition in a space between the substrate and the mold, obtain the captured image of the curable composition; a generator configured to generate a predicted image representing a prediction result of a behavior of the curable composition on the substrate in the process; and a display controller configured to display, on a display unit, the captured image and the predicted image to be comparable to each other.

公开(公告)号：US11651118B2

公开(公告)日：2023-05-16

申请号：US16896587

申请日：2020-06-09

Applicant: CANON KABUSHIKI KAISHA

Inventor： Tosiya Asano ,  Junichi Seki ,  Yuichiro Oguchi

IPC: G06F30/20 ,  B29C59/02 ,  G03F7/00

CPC classification number: G06F30/20 ,  B29C59/026 ,  G03F7/0002

Abstract: There is provided a simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on one of a first member and a second member into contact with an other of the first member and the second member and forming a film of the curable composition on the first member. The method includes generating a link by connecting two adjacent representative points of the plurality of droplets, generating a cell as a closed region formed by a plurality of links, and determining, based on the presence/absence of merging of droplets corresponding to each link forming the cell, whether a bubble is formed in the cell.

公开(公告)号：US11366385B2

公开(公告)日：2022-06-21

申请号：US16852201

申请日：2020-04-17

Applicant: CANON KABUSHIKI KAISHA

Inventor： Toshiki Ito ,  Masayuki Nakajima ,  Kiyohito Yamamoto ,  Yuichiro Oguchi ,  Naoki Kiyohara

IPC: G03F7/00 ,  B29C33/42

Abstract: An imprint mold includes a mesa portion projecting from a base material. The mesa portion includes a contact surface configured for contact with a curable composition made of an organic material, and a surface of a side wall at which the contact surface projects from the base material. A liquid repellent surface is formed on at least the surface of the side wall, the liquid repellent surface having a contact angle with respect to the curable composition being higher than a contact angle of the contact surface. The liquid repellent surface includes at least one type of compound selected from the group consisting of an oxide of an inorganic element, a fluoride of an inorganic element, and a nitride of an inorganic element.

公开(公告)号：US20220035968A1

公开(公告)日：2022-02-03

申请号：US17375076

申请日：2021-07-14

Applicant: CANON KABUSHIKI KAISHA

Inventor： Ken Katsuta ,  Sentaro Aihara ,  Yuichiro Oguchi

IPC: G06F30/20 ,  G03F7/00

Abstract: The present invention provides a simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member into contact with a second member and forming a film of the curable composition in a space between the first member and the second member, the method including determining a second range for executing second simulation for predicting the behavior with second accuracy higher than first accuracy, the second range being included in a first range for executing first simulation for predicting the behavior with the first accuracy and the second range being smaller than the first range, executing the second simulation in the second range, and displaying a result of the second simulation executed in the second range.

公开(公告)号：US12175170B2

公开(公告)日：2024-12-24

申请号：US17101064

申请日：2020-11-23

Applicant: CANON KABUSHIKI KAISHA

Inventor： Shintaro Narioka ,  Yuichiro Oguchi

IPC: G06F30/20 ,  G03F7/00 ,  G06F16/25 ,  G06F113/22

Abstract: In order to provide an efficient and favorable simulation method for obtaining the disappearance of a number of air bubbles in one entire shot or the like, for example, there is provided a simulation method for simulating a film forming process of forming a film by coating an upper part of a substrate with a curable composition in a form of a plurality of droplets and bringing a mold into contact therewith. The simulation method includes a first step of computing a size of each air bubble at a time when air bubbles become trapped due to the mold brought into contact therewith and a time of becoming trapped, and a second step of obtaining a disappearing process of each of the air bubbles on the basis of information of the size of each of the air bubbles and the time.

公开(公告)号：US11721011B2

公开(公告)日：2023-08-08

申请号：US17380087

申请日：2021-07-20

Applicant: CANON KABUSHIKI KAISHA

Inventor： Takahiro Nakayama ,  Yuichiro Oguchi

IPC: G06T7/00 ,  G06F3/14 ,  H04N7/18 ,  G06V40/20

CPC classification number: G06T7/0004 ,  G06F3/14 ,  G06V40/20 ,  H04N7/18 ,  G06T2207/20076 ,  G06T2207/30164

Abstract: The present invention provides an information processing apparatus comprising: an obtainer configured to, in a process of supplying a curable composition onto a substrate or a mold and forming a film of the curable composition in a space between the substrate and the mold, obtain the captured image of the curable composition; a generator configured to generate a predicted image representing a prediction result of a behavior of the curable composition on the substrate in the process; and a display controller configured to display, on a display unit, the captured image and the predicted image to be comparable to each other.

公开(公告)号：US20220261521A1

公开(公告)日：2022-08-18

申请号：US17587283

申请日：2022-01-28

Applicant: CANON KABUSHIKI KAISHA

Inventor： Keiji Yamashita ,  Sentaro Aihara ,  Yuichiro Oguchi ,  Ken Katsuta

IPC: G06F30/28 ,  G03F7/00

Abstract: The invention provides a simulation method that predicts a behavior of a droplet of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member into contact with a second member and forming a film made of the curable composition in a space between the first member and the second member, the method including obtaining, for each of the plurality of droplets of the curable composition, gas information, which includes at least the mole of a gas trapped in a closed region formed by adjacent droplets merging with each other, based on an evaluation value for evaluating a relationship related to a degree of merging between the adjacent droplets, and displaying the gas information, obtained in the obtaining, together with information indicating a state of the droplet corresponding to the gas information.

公开(公告)号：US20210192107A1

公开(公告)日：2021-06-24

申请号：US17101064

申请日：2020-11-23

Applicant: CANON KABUSHIKI KAISHA

Inventor： Shintaro Narioka ,  Yuichiro Oguchi

IPC: G06F30/20 ,  G03F7/00 ,  G06F16/25

Abstract: In order to provide an efficient and favorable simulation method for obtaining the disappearance of a number of air bubbles in one entire shot or the like, for example, there is provided a simulation method for simulating a film forming process of forming a film by coating an upper part of a substrate with a curable composition in a form of a plurality of droplets and bringing a mold into contact therewith. The simulation method includes a first step of computing a size of each air bubble at a time when air bubbles become trapped due to the mold brought into contact therewith and a time of becoming trapped, and a second step of obtaining a disappearing process of each of the air bubbles on the basis of information of the size of each of the air bubbles and the time.

公开(公告)号：US20220212371A1

公开(公告)日：2022-07-07

申请号：US17705165

申请日：2022-03-25

Applicant: CANON KABUSHIKI KAISHA

Inventor： Naoki Kiyohara ,  Yuichiro Oguchi ,  Toshiki Ito

IPC: B29C33/42 ,  B29C59/02 ,  H01L21/027

Abstract: An imprint mold having an imprint surface that comes into contact with a curable composition on a substrate, the imprint mold includes a concavo-convex pattern formed on the imprint surface of the imprint mold, and a first step portion that has a first surface having a depth of 0.5 times or more and 2 times or less a depth of the concavo-convex pattern in an outer peripheral portion of an area where the concavo-convex pattern is formed.

公开(公告)号：US20210350047A1

公开(公告)日：2021-11-11

申请号：US17382572

申请日：2021-07-22

Applicant: CANON KABUSHIKI KAISHA

Inventor： Tosiya Asano ,  Junichi Seki ,  Yuichiro Oguchi

IPC: G06F30/20

Abstract: A simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member and a second member into contact with each other and forming a film of the curable composition on the first member is disclosed. The method includes defining a computational grid formed by a plurality of computational elements so that a plurality of droplets of the curable composition fall within one computational element, and obtaining the behavior of the curable composition in each computational element in accordance with a model corresponding to a state of the curable composition in each computational element.