Invention Grant
- Patent Title: Extreme ultraviolet light generation system and electronic device manufacturing method
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Application No.: US17492280Application Date: 2021-10-01
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Publication No.: US11366394B2Publication Date: 2022-06-21
- Inventor: Koichiro Koge , Atsushi Ueda , Takayuki Osanai
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JPJP2020-188485 20201112
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G21K1/06 ; H05G2/00 ; H01S3/16 ; H01S3/223

Abstract:
An extreme ultraviolet light generation system may include a chamber, a first partition wall having at least one opening which provides communication between a first space and a second space, an EUV light concentrating mirror located in the second space and configured to concentrate extreme ultraviolet light generated in a plasma generation region located in the first space, a first gas supply port formed at the chamber, and a gas exhaust port formed in the first partition wall, a distance between the center of the plasma generation region and an edge of the at least one opening being equal to or more than a stop distance LSTOP [mm] calculated by the following equation: LSTOP=272.8·EAVG0.4522·P−1 EAVG [eV] representing average kinetic energy of ions generated in the plasma generation region and P [Pa] representing a gas pressure inside the first partition wall.
Public/Granted literature
- US20220146943A1 EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD Public/Granted day:2022-05-12
Information query
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