Invention Grant
- Patent Title: Method of forming a magnetic core on a substrate
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Application No.: US16056847Application Date: 2018-08-07
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Publication No.: US11373803B2Publication Date: 2022-06-28
- Inventor: Peng Suo , Yu Gu , Guan Huei See , Arvind Sundarrajan
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Main IPC: H01F7/06
- IPC: H01F7/06 ; H01F41/04 ; H01F17/00 ; H01F27/28 ; H01L21/48 ; H01L23/498 ; H01L49/02
Abstract:
A method of forming a magnetic core on a substrate having a stacked inductor coil includes etching a plurality of polymer layers to form at least one feature through the plurality of polymer layers, wherein the at least one feature is disposed within a central region of a stacked inductor coil formed on the substrate; and depositing a magnetic material within the at least one feature.
Public/Granted literature
- US20190051454A1 SEMICONDUCTOR SUBSTRATE HAVING MAGNETIC CORE INDUCTOR AND METHOD OF MAKING SAME Public/Granted day:2019-02-14
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