- 专利标题： Method and system for component analysis of spectral data
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申请号： US17166885申请日： 2021-02-03
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公开(公告)号： US11373839B1公开(公告)日： 2022-06-28
- 发明人: Petr Hlavenka , Jan Klusacek , Ondrej Sembera
- 申请人： FEI Company
- 申请人地址： US OR Hillsboro
- 专利权人： FEI Company
- 当前专利权人： FEI Company
- 当前专利权人地址： US OR Hillsboro
- 主分类号： H01J37/244
- IPC分类号： H01J37/244 ; H01J37/28
摘要：
Responsive to irradiation of a charged particle beam, emission from sample is acquired in the form of spectral data. The spectral data is decomposed by a machine learning estimator to abundances and spectral components based on a character of the detector. Images showing compositional information of the sample are generated based on the abundances and the spectral components.
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