- Patent Title: Wafer purging-type shelf assembly and buffer module having the same
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Application No.: US16296430Application Date: 2019-03-08
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Publication No.: US11380567B2Publication Date: 2022-07-05
- Inventor: June Phil Yoon , Jae Won Jang
- Applicant: CLEAN FACTOMATION, INC.
- Applicant Address: KR Gyeonggi-do
- Assignee: CLEAN FACTOMATION, INC.
- Current Assignee: CLEAN FACTOMATION, INC.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Finch & Maloney PLLC
- Agent Michael J. Bujold; Jay S. Franklin
- Priority: KR10-2018-0115097 20180927
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/673
Abstract:
Disclosed herein are a wafer purging-type shelf assembly and a buffer module having the same. The wafer purging-type shelf assembly includes: a shelf formed to support a wafer receiving container; a supply nozzle configured to be connected to an injection port of the wafer receiving container; and a gas supply line configured to supply an inert gas discharged from a factory gas facility to the wafer receiving container through the supply nozzle, wherein the gas supply line includes a proportional pressure control valve unit that adjusts a supply flow rate of the inert gas to the wafer receiving container by an area control method.
Information query
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